My science and technology museum

Chapter 97 Preparing photoresist [Please recommend monthly tickets]

After so many years of research and development of lithography machines, everyone knows the theoretical system, but whether it can be realized with technology is crucial.

Although Xu Lei took the lead in solving the light source system, it can achieve high resolution and service life.

Formulation of photoresists is trickier.

Neon Guoneng provides high-end photoresists to overseas photolithography machine companies, largely relying on its own development in the field of special materials.

Due to the relatively weak background of this industry in China, many raw materials need to be developed from scratch by Xu Lei, which will naturally be much slower in terms of efficiency.

Moreover, to ensure that 3 nanometer or even 1 nanometer chip circuits are etched on the wafer, the requirements for photoresist are higher. At least the grade must exceed the photoresist used by overseas high-end photolithography machines. Otherwise, if the final and production If the top-notch photolithography machines that come out are not matched with each other, they will look like a sword with a rotten wooden scabbard, which will look awkward.

As for the research and development of the objective lens system, the progress is obviously much faster.

The lenses used by overseas high-end lithography machines basically come from German companies.

And every piece of lens on the lens is manually polished to ensure that there are no flaws in the lens.

Although there are no craftsmen of this level in Huake Academy, relying on Xingtong's powerful intelligent computing capabilities and Xu Lei's control, the final polished lenses can meet the needs of top-level photolithography machines.

So in this case.

Finally, when the components of the lithography machine are successfully assembled and can be tested.

Only the photoresist remains unresolved.

This leaves others to wait patiently and believe that Xu Lei can prepare top-quality photoresist.

However, because the Chinese Academy of Sciences has already let the wind go, it said that domestic lithography machines will be put into use around the Spring Festival.

So as time passed by day by day, everyone began to feel nervous.

Especially Dean Yang Senping.

Almost moved his office to the laboratory.

Spend most of the time in the project research center.

certainly.

In addition to being concerned about the progress of the project, more importantly, he wants to ensure that there are no mistakes in the new project research team here, so as to avoid serious consequences.

After screening the members of the project team he was previously responsible for, it was discovered that one of them had special connections with overseas forces.

After investigation, it was determined that it was the other party who spread the news about the dissolution of the project team.

Although Yang Senping dealt with this seriously in accordance with the regulations, he did not want to see a similar situation occur in the new project team that Xu Lei was responsible for, so he came to the laboratory more frequently than in the first few days.

Soon, the time came to late January.

When all future technology companies are on normal annual vacation, all members of the lithography machine project research team of the Chinese Academy of Sciences are still sticking to their jobs.

But compared to the confidence last month, most people now have a look of urgency on their faces.

"Dean Yang, there are only a few days until the Spring Festival."

"But the photoresist problem is still unresolved. If this continues, it will definitely cause quite a stir on the Internet."

This morning.

Outside the chemistry lab.

As a scientific researcher said these words in front of Yang Senping, everyone immediately started chatting about what they were thinking at this time.

"Since guarantees have been made to the people, they must be fulfilled no matter what."

"The last announcement was too radical. If time had been available, we wouldn't have to consider this issue now."

"I suggest just using the photoresist currently formulated. Even if it is not of top quality, it is enough to produce 7-nanometer chips, which will still shock the outside world."

Although Xu Lei has not yet formulated the photoresist he wants, his research during this period is not without results.

The newly formulated photoresist can be said to have reached the standards used by overseas photolithography machines.

If used in this way on domestic lithography machines, it will still cause shock around the world, and it will also bring a successful conclusion to the previous announcement.

However, Xu Lei's goal from the very beginning was to reproduce the top-notch photolithography machine collected in the museum. If the effect was greatly reduced just because of a photoresist, he could not accept it.

So even if the Spring Festival is approaching, I still let myself soak in the laboratory.

Yang Senping listened to everyone's words and seemed very troubled in his heart.

Don't know how to handle this.

But purely from a selfish point of view, he is still more inclined to maintain the reputation of the hospital.

Anyway, there doesn't seem to be much of a problem if we publish the current research results first and then continue to prepare top-quality photoresist.

However, after careful weighing, Yang Senping did not make a decision directly. Instead, he turned his attention to Hao Yaoping next to him and wanted to ask for his opinion.

After all, Hao Yaoping is the oldest academician in the project research group, and many people are even his students.

In some places, he can speak better than the dean.

"What does Mr. Hao think about this matter? Do we need to announce the current research results to the outside world under this situation?"

Hao Yaoping, who was sitting quietly listening to the arguments, saw that Yang Senping brought the topic to him, so he had to clear his throat and say a few words.

"We were able to assemble this top-level photolithography machine, and all the technologies are far superior to those of overseas companies. Most of them are due to Xu Lei."

"Without him, let alone announcing it to the outside world, I'm afraid we wouldn't be able to achieve results even after several years of research."

As Hao Yaoping's voice rang in everyone's ears, everyone blushed, but they did not dare to have any objections.

Who let that be the case.

Hao Yaoping saw everyone's performance in his eyes, paused for a few seconds and then continued: "Since XCMG is confident in formulating photoresist suitable for top-level photolithography machines, we should give our full support."

"Until the photoresist comes out."

"As for the discussions outside, do we scientific researchers need to care about these?"

When Hao Yaoping finished speaking, Yang Senping immediately understood that the matter had been concluded, so he quickly took advantage of the atmosphere to announce on the spot: "Mr. Hao is right, XCMG is responsible for the entire project research group, as long as he has no such plan Then we will wait patiently for this photoresist to be formulated."

"By then, our chip manufacturing technology will far exceed that of overseas companies."

Having said this, others naturally stopped talking, and then returned to their jobs to conduct new tests and optimization of various components of the lithography machine.

Make sure that no special circumstances will occur when the photoresist comes out and the actual test is performed.

And it has to be said that the concerns of the members of the project research team are very reasonable.

Although there are still a few days until the Spring Festival, many netizens spontaneously went to the official account of the Chinese Academy of Sciences to urge me.

Later, it even appeared on two hot searches every day, and it almost became a daily repertoire.

As for professional companies in the industry, although they do not use this method to ask questions like netizens do, they are still very concerned about it.

I want to know what level domestic photolithography machines have reached.

Mainly this is related to the development of related industries.

The sooner we know the specific situation, the sooner we can make plans, which will be beneficial to subsequent development.

But what has a greater impact is the amplified reporting of this matter by overseas media, which swore that it was impossible for the Chinese Academy of Sciences to develop high-end lithography machines.

In addition, in the face of such great external pressure, the Chinese Academy of Sciences did not make any response, which inadvertently increased everyone's suspicion.

On all major platforms and websites across the Internet, you can see fierce discussions on any relevant content.

"I may be really disappointed this time. It seems that the research and development of domestic lithography machines does still have a long way to go."

"It's okay to be behind in technology. The key is to deliberately release this kind of news. It has no effect except to let everyone experience a huge sense of gap."

"The Spring Festival is in a few days. Where is the lithography machine?"

"Everyone should just wash up and go to sleep. There is no photolithography machine. They are all just dreaming."

"I don't understand why it's necessary to be so anxious. What they said was obviously around the Spring Festival. Why are you questioning it now?"

"In the next ten years or so, there is no point in playing word games."

"While you are still questioning this controversy, smart people have already taken over the semiconductor industry funds."

"You are so cruel, you still dare to play with funds in such a situation. I remember correctly that the relevant industries have been falling for several days in a row."

Among the many comments and messages, although some are willing to believe in domestic lithography machines, they cannot make any waves in the massive wave of doubts.

Totally unremarkable.

Compared with the turmoil outside, Xu Lei is deaf to what is going on outside the window at the moment, focusing solely on photoresist.

"The host material must reduce high-absorption elements as much as possible, introduce special metal oxides to increase the photosensitivity speed of photolithography, enhance the system's corrosion resistance, reduce the film thickness of the photoresist, and ultimately further improve the resolution."

“There should be no problem this time.

"As long as it is completed successfully, a photoresist suitable for top-level photolithography machines can be formulated."

Friday, January 24, 2020.

New Year's Eve.

Inside the Chemistry Laboratory of the Chinese Academy of Sciences.

At this moment, Xu Lei was wearing experimental clothes and standing next to the workbench, playing with various precision instruments on it.

Although I couldn't see his specific expression, judging from the murmur in his mouth, he was confident this time.

Subsequently, with the cooperation of several assistants, special metal oxides were introduced into the system material, and under the automatic operation of the equipment, a photoresist that could be directly applied to the wafer was gradually formed.

However, whether it can achieve the desired effect and successfully produce 3-nanometer chips requires actual testing at the lithography machine.

As for the 1-nanometer chip, which is called the physical limit, it cannot be produced yet because the required special metal materials have not yet been shipped.

But what is certain is that although no one went home this Spring Festival, it was definitely the happiest and most exciting day in decades.

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